From: Shielding effect of the smoke plume by the ablation of excimer lasers
Air flow velocity | Percent difference | Collapsed indicators [μm] | ||||
---|---|---|---|---|---|---|
[m/s] | AB | AC | BC | M | SD | SE |
4.6 | 0.63 | 0.63 | 0.00 | 63.87 | 0.23 | 0.13 |
4.9 | 0.63 | 1.56 | 0.93 | 64.27 | 0.50 | 0.29 |
5.3 | 0.31 | 1.55 | 1.23 | 64.60 | 0.53 | 0.31 |
5.5 | 0.93 | 2.16 | 1.23 | 64.67 | 0.70 | 0.41 |
5.7 | 0.46 | 1.84 | 1.38 | 65.10 | 0.62 | 0.36 |
6.1 | 0.77 | 2.29 | 1.52 | 65.37 | 0.76 | 0.44 |
6.4 | 0.46 | 1.37 | 0.91 | 65.50 | 0.46 | 0.26 |
6.7 | 0.46 | 1.36 | 0.91 | 65.90 | 0.46 | 0.26 |
7.4 | 0.15 | 0.90 | 1.06 | 66.27 | 0.38 | 0.22 |